Single Shot Intrared Ellipsometry with a Free Electron Laser and its Potential Applications

A novel division of amplitude polarimeter (DOAP) approach for single shot - infrared ellipsometry with a free electron laser source is presented. The set-up enables the simultaneous determination of the two independent ellipsometric parameters by measuring two ratios of intensities so that variations of the pulse power essentially do not affect the result. As proof-of-principle experiment we determined successfully the optical response of thin polymeric films on silicon. The high brilliance of the ELBE free electron laser combined with the DOAP principle gives unique opportunities for e.g. micro-focus, imaging or pump-probe ellipsometry.