Plasma immersion ion implantation for surface modification

In the present work the surface processes during oxygen PIII and the microstructure and properties of the modified surface layers were studied. The samples were examined by X-ray diffraction analysis, Auger electron spectroscopy, atomic force microscopy, spectroscopic ellipsometry and corrosion and blood compatibility tests. Oxygen PIII at an ion energy of 40 keV and a substrate temperatures below 300°C results in the formation of a transparent rutile TiO2 surface layer with a Ni content down to below 1 at%. This layer prevents from corrosion and out-diffusion of Ni ions. Biocompatibility tests show a largely superior in vitro blood compatibility compared to the untreated samples.