Ion beam synthesis of 4H-(Si1-xC1-y)Gex+y solid solutions

4H-(Si1-xC1-y)Gex+y solid solutions with a Ge incorporation on lattice site from 0.7 to 2.5 percent were formed by ion beam synthesis. The concentration was varied from 1 to 20 % by implanting Ge at 600 C. The implanted samples were annealed at 1300 C in a rapid thermal processing equipment.