Helium Bubbles in Silicon: Study of the Residual Helium Content using Elastic Recoil Detection Analysis

Kaschny, J. R.; Fichtner, P. F. P.; Mücklich, A.; Kreißig, U.; Yankov, R. A.; Skorupa, W.

Lecture (Conference)
13th Int. Conf. on Ion Beam Analysis (IBA-13), Lissabon, Portugal, July 27 - Aug 1, 1997
Contribution to external collection
Nucl. Instr. Meth. B136-138 (1998) 583

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