nm scale resolution single ion implantation into diamond for quantum dot production

NV-centres are commonly known as good candidates for spintronic and optical quantum computer applications. These centres have already been used to construct single photon sources .
We present a set up to position / implant single atoms with nm resolution into diamond surface. An atomic force microscope (AFM) tip and a focused ion beam (FIB) set up form the core of our set up. High precision positioning of atoms requires cooled atom handling. An accuracy of more than 5nm requires ion energies below 1keV. Otherwise single ion impact detection becomes impossible at these low energies. We discuss these requirements and challenges and present a suitable solution based on an AFM tip acting as a collimator diaphragm.