Precipitation Studies in Oxygen- and Nitrogen Rich Silicon Formed by High Dose Implantation

Precipitation Studies in Oxygen- and Nitrogen Rich Silicon Formed by High Dose Implantation

Weber, R.; Müller, R.; Skorupa, W.

• Other report
  E-MRS 1993 Spring Meeting, Strasbourg, May 4-7, 1993
  DOI: 10.1016/0168-583X(94)95771-1
  Cited 3 times in Scopus

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