Growth of sputter-deposited Ti_1-xAl_xN investigated by in-situ x-ray diffraction

Growth of sputter-deposited Ti_1-xAl_xN investigated by in-situ x-ray diffraction

Beckers, M.; Schell, N.; Martins, R. M. S.; Möller, W.

Kein Abstract vorhanden.

Lecture (Conference)
Symp. of the Belgium and Dutch Vacuum Society, 09.-10.12.2004, Gent, Belgium

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