X-ray grazing incidence diffraction: A tool to optimize focused ion beam implantation

X-ray grazing incidence diffraction: A tool to optimize focused ion beam implantation

Grenzer, J.; Bischoff, L.; Pietsch, U.

• Lecture (Conference)
  7th Biennial Conf. on High Resolution X-Ray Diffraction and Imaging, 07.-10.09.2004, Prague, Czech Republic

Permalink: https://www.hzdr.de/publications/Publ-9795