Application of combined low and high energy ion assistance for film formation and stress relaxation of cBN thin films

Application of combined low and high energy ion assistance for film formation and stress relaxation of cBN thin films

Kolitsch, A.; Abendroth, B.; Gago, R.; Fitz, R.; Möller, W.

There is no abstract provided.

  • Invited lecture (Conferences)
    IV International Symposium “Ion Implantation and Other Application of Ions and Electrons” ION 2004, 14.-17.04.2004, Kazimierz Dolny, Poland

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