X-ray studies of semiconductor surfaces modified by focused ion beam implantation

X-ray studies of semiconductor surfaces modified by focused ion beam implantation

Grenzer, J.; Bischoff, L.; Posselt, M.; Pietsch, U.

• Lecture (Conference)
  8th Biennial Conference on High Resolution X-ray Diffraction and Imaging, 19.-22.09.2006, Karlsruhe, Germany
• Lecture (Conference)
  Deutsche Tagung für Forschung mit Synchrotronstrahlung, Neutronen und Ionenstrahlen an Grossgeräten (SNI-2006), 04.-06.10.2006, Hamburg, Germany

Permalink: https://www.hzdr.de/publications/Publ-9864