High resolution grazing incidence diffraction on lateral nanostructures created by focused ion beam implantation on semiconductor surfaces

High resolution grazing incidence diffraction on lateral nanostructures created by focused ion beam implantation on semiconductor surfaces

Grenzer, J.; Bischoff, L.; Posselt, M.; Pietsch, U.

• Lecture (Conference)
  Deutsche Tagung für Forschung mit Synchrotronstrahlung, Neutronen und Ionenstrahlen an Grossgeräten (SNI-2006), 04.-06.10.2006, Hamburg, Germany

Permalink: https://www.hzdr.de/publications/Publ-9865