Investigation of gettering effects in CZ-type Silicon with SIMS

Krecar, D.; Fuchs, M.; Kögler, R.; Hutter, H.

Gettering effects in CZ-type Silicon are investigated with SIMS

Keywords: gettering; SIMS; Si; defects

Lecture (Conference)
13th Arbeitstagung Angewandte Oberflächenanalytik (AOFA), 14.-17.10.2004, Dresden, Deutschland

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