Ion beam assisted Ge nanocrystallization in Ta2O5 films

Peeva, A.; Kalitzova, M.; Zollo, G.; Beshkov, G.; Vitali, G.; Skorupa, W.

The ion beam assisted formation of Ge nanocrystals in Ta2O5 films is studied.

Keywords: ion beam assisted naocrystallization

Lecture (Conference)
13th Int. School on Condensed Matter Physics, 30.08.-03.09.2004, Varna, Bulgaria

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