Manipulation of 2D arrays of Si nanocrystals by ultra-low-energy ion beam-synthesis for nonvolatile memories applications

Bonafos, C.; Cherkashin, N.; Carrada, M.; Coffin, H.; Ben Assayag, G.; Schamm, S.; Dimitrakis, P.; Normand, P.; Perego, M.; Fanciulli, M.; Mueller, T.; Heinig, K.-H.; Argawal, A.; Claverie, A.

Manipulation of 2D arrays of Si nanocrystals by ultra-low-energy ion beam-synthesis for nonvolatile memories applications

Bonafos, C.; Cherkashin, N.; Carrada, M.; Coffin, H.; Ben Assayag, G.; Schamm, S.; Dimitrakis, P.; Normand, P.; Perego, M.; Fanciulli, M.; Mueller, T.; Heinig, K.-H.; Argawal, A.; Claverie, A.

An abstract is not available, please contact the authors.

Keywords: Si; nanocrystals; nonvolatile memory

Lecture (Conference)
2004 MRS Fall Meeting, 29.11.-03.12.2004, Boston, USA

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