Pattering data from NPVE software for Helium Ion Microscopy (HIM) irradiation data

Pattering data from NPVE software for Helium Ion Microscopy (HIM) irradiation data

Hlawacek, G.; Fowley, C.; Kuria, J.
Project Member: Fowley, Ciaran; Project Member: Kurian, Jinu; Project Leader: Doudin, Bernard

Keywords: focused ion beam; helium ion microscopy; nanopatterning; magnetic

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• Reseach data in the HZDR data repository RODARE
  Publication date: 2023-01-03 Open access
  DOI: 10.14278/rodare.2054
  Versions: 10.14278/rodare.2055
  License: CC-BY-4.0

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• Veröffentlichung im HZDR-Daten-Repository RODARE - Id 2054

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Publ.-Id: 36030