A Compact, Versatile Low-Energy Electron Beam Ion Source

Electron Beam Ion Sources (EBIS) were originally developed to produce highly charged ions (HCI) [1]. For this purpose, high density electron beams at electron beam energies higher than the ionization potential of the desired ion species are required leading to the development of high energy and high current devices working with superconducting magnet coils.
For applications with focus on low and intermediate charge states EBIS/T with high-energy density rare-earth permanent magnets are an economic and compact alternative [2-5]. EBIS/T setups for electron beam energies of 2 keV and below have become more interesting recently. They can be used as sources of electromagnetic radiation in the UV, EUV, and visible light region for calibration purposes, as reference source for emission and absorption spectroscopy with ions of intermediate charge states in astrophysical experiments, as ion sources for research in radiation biology and medicine, and for the diagnostics of plasmas in fusion devices in the low energy range.