Computer simulation and RBS/C studies of high dose N⁺ and Al co-implantation in 6H-SiC

Computer simulation and RBS/C studies of high dose N⁺ and Al co-implantation in 6H-SiC

Kharlamov, V. S.; Kulikov, D. V.; Trushin, Y. V.; Yankov, R. A.; Voelskow, M.; Petzoldt, J.; Skorupa, W.

• Contribution to external collection
  Proc. SPIE-The Int.Society for Optical Engineering 3345 (1998) 260

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