Preparation and Characterization of Solar Thermal Absorbers by Nanoimprint Lithography and Sputtering
Preparation and Characterization of Solar Thermal Absorbers by Nanoimprint Lithography and Sputtering
Mitteramskogler, T.; Haslinger, M. J.; Wennberg, A.; Fernandez Martínez, I.; Muehlberger, M.; Krause, M.; Guillén, E.
Selective solar absorbers comprised of plasmonic materials offer great flexibility in design along with a highly promising optical performance. However, the nanopattern generation, typically done with electron beam writing, is a very time-intensive process. In this work, we present a fast, scalable, and flexible method for the fabrication of plasmonic materials by the combination of a deposition mask prepared by nanoimprint lithography and thin film deposition by magnetron sputtering. The fabrication process was first performed on silicon wafer substrates using AFM and SEM measurements to calibrate the deposition time, determine maximal deposition height, and characterize samples. Afterwards, the process was transferred to polished Inconel NiCr-alloy substrates used in high temperature solar absorbers. To investigate the adhesion properties of the nanostructure on the substrate, two different deposition methods were investigated: DC magnetron sputtering and High Power Impulse Magnetron Sputtering (HiPIMS).
Keywords: Solar absorbers; nanoimprint lithography; HiPIMS
Involved research facilities
- Ion Beam Center DOI: 10.17815/jlsrf-3-159
Related publications
- DOI: 10.17815/jlsrf-3-159 is cited by this (Id 30516) publication
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Contribution to proceedings
2019 MRS Spring Meeting & Exhibition, 22.-26.04.2019, Phoenix, USA
MRS Advances 4(2019)35, 1905-1911: Cambridge
DOI: 10.1557/adv.2019.285 -
Lecture (Conference)
2019 MRS Spring Meeting & Exhibition, 22.-26.04.2019, Pheonix, USA
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