In situ depth-resolved compositional, structural and optical characterization of functional thin films at high temperatures

In addition to classical studies comparing composition, structure and functional properties of thin films before and after high-temperature treatments, new approaches towards the correlation of optical properties, composition and structural changes upon annealing are necessary by using in situ techniques. In situ measurements allow the investigation of the materials in real-time under conditions simulating the intended applications, e.g. high temperatures and defined atmospheres. Intra- and interlayer phase transitions, defect generation and annealing, degradation processes, such as element redistribution and interface mixing, as well as material exchange with the environment can have substantial effects on the material’s structure, properties and functionality. All these processes can be studied employing in situ techniques.
In this work, various applications of a cluster tool for depth-resolved compositional, structural and optical characterization of layered materials with thicknesses ranging from sub-nm to 1 μm and for temperatures of -100 to 800 °C are described. [1] The techniques implemented in this setup include Rutherford backscattering spectrometry (RBS), Elastic Recoil Detection (ERD), Raman spectroscopy, Spectroscopic Ellipsometry (SE) and UV-Vis-NIR spectrometry. These in situ techniques allow to identify and to quantify element redistributions, material losses and gains, and the conservation or changes of the optical material properties. Intermixing of the sharp interlayers could also appear at temperatures of up to 800 °C. The onset-temperature of those effects, corresponding to the stability limit, are identified by the in situ measurements. Results of different material systems and processes will be presented including: i) metal-induced crystallization of amorphous carbon in a layer stack of SiO₂/ a-C/ Ni; ii) high-temperature stability tests of a SnO₂:Ta transparent conductive oxide coating [2] and of a WAlSiN-based solar-selective coating [3] as well as iii) diffusion monitoring of an solid-lubricant Ag-rich layer sandwiched between two layers of either TiN or TiSiN.

References

[1] R. Wenisch, F. Lungwitz, D. Hanf, R. Heller, J. Zscharschuch, R. Hübner, J. von Borany, G. Abrasonis, S. Gemming, R. Escobar-Galindo, M. Krause. Anal. Chem. 90 (2018) 7837–7842.
[2] F. Lungwitz, R. Escobar-Galindo, D. Janke, E. Schumann, R. Wenisch, S. Gemming, M. Krause. Sol. Energy Mater. Sol. Cells. 196 (2019) 84–93.
[3] K. Niranjan, M. Krause, F. Lungwitz, F. Munnik, R. Hübner, S. Pramod Pemmasani, R. Escobar Galindo, H. C. Barshilia. Sol. Energy Mater. Sol. Cells. 255 (2023) 112305.