Publications Repository - Helmholtz-Zentrum Dresden-Rossendorf

Ongoing miniaturization down to a few nanometers will lead to further significant
reductions in the power consumption of microchips and sensors. The number of
innovative applications immediately arise from the potential of integrating a
microbattery as a power source for flexible electronics, wearables, the Internet of
Things, medical implants and sensor chips.
In this work, a thin film lithium-Ion battery (TF-LIB) is demonstrated. The TF-LIB consists
of a high potential copper silicide anode (CuSi-anode) that can be integrated on a Siwafer
with standard semiconductor technology and a hybrid polymer electrolyte with a
high lithium-ion transference number. Two cathode materials were tested: LiFePO4 and
NCA.
The CuSi-anode is fabricated by Si sputtering followed by flash lamp annealing (FLA).
This anode material replaces metallic lithium for reaching high energy densities and
provides the thermal stability required in microelectronics (> 230 °C for soldering).
The hybrid polymer electrolyte is mechanically stable against the volume change of the
silicon during the lithiation/ delithiathion processes. The electrolyte is unreactive and
thermally stable at high temperatures during operation.