Plasma immersion íon implantation with high-energy íons for use in surface treatments
Plasma immersion íon implantation with high-energy íons for use in surface treatments
Rossi, J. O.; Ueda, M.; Reuther, H.
Plasma immersion íon implantation with high-energy íons for use in surface treatments
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Lecture (Conference)
8th Brazilian Meeting of Plasma Physics, 27.-30.11.2005, Niteroi, Rio de Janeiro, Brazil
Permalink: https://www.hzdr.de/publications/Publ-7889
