Mechanisms of target poisoning during reactive sputtering of TiN

Mechanisms of target poisoning during reactive sputtering of TiN

Möller, W.

• Invited lecture (Conferences)
  BELVAC Symposium on Reactive Sputter Deposition, , Belgium, 30.11.2006, Ghent, Belgium

Permalink: https://www.hzdr.de/publications/Publ-9313