Publications + Patents
1990
1. L. Bischoff, T. Chudoba and F.K. NaehringOn mask repair with focused ion beam
Physical Research 13 (1990) 423 – 426
1991
2. L.Bischoff; E.Hesse; D.Janssen; F.K.Naehring;
F.Nötzold; G.Schmidt and J.Teichert
Focused ion beam system with high current density
Microelectronic Engineering 13 (1991) 367 - 370
1992
3. J. Teichert and D. Janssen
Time of flight corrected beam blanker for ion
beam lithography systems
Optik 91 (1992) 46
1993
4. J. Teichert and M.A. Tiunov
Achromatic two?stage ExB mass filter for a focused
ion beam column with collimated beam
Meas. Sci. Technol. 4 (1993) 754?763
5. E. Hesse and F.K. Naehring
Narrow emission from a lithium liquid metal ion
source
J. Phys. D: Appl.Phys. 26 (1993)
717 - 719
6. J. Teichert and M.A. Tiunov
Design of an achromatic mass separator for a
focused ion beam system
Proc. of the SPIE, Vol. 2014 Charged?Particle
Optic (1993) 85
7. L.Bischoff, E.Hesse, G.Hofmann, F.K.Naehring,
W.Probst, B. Schmidt, and J.Teichert
High current FIB system for micromechanics application
Microelectronic Engineering 21 (1993) 197 - 200
1994
8. E. Hesse, F.K. Naehring and J. Teichert
A lithium liquid metal ion source with a narrow
angle emission for writing beam lithography
Microelectronic Engineering 23 (1994) 111 - 114
9. E.Hesse, L.Bischoff and J.Teichert
Development of a cobalt liquid alloy ion source
J. Phys. D: Appl. Phys. 27 (1994)
427 - 428
10. J. Teichert, L. Bischoff, E. Hesse, D. Panknin
and W. Skorupa
Formation of CoSi2 wires by maskless implantation
with the focused ion beam
Mat. Res. Soc. Symp. Proc. 316 (1994) 741-
746 and 320 (1994) 153 - 158
11. L. Bischoff, J.Teichert, E.Hesse, D.Panknin
and W.Skorupa
Writing implantation with a high current focused
ion beam to form CoSi2 ? microstructures
J. Vac. Sci. Technol. B 12 (1994) 3523 - 3527
12. L. Bischoff, E. Hesse, D. Panknin, W. Skorupa,
and J. Teichert
Writing implantation with a high current density
focused ion beam
Microelectronic Engineering 23 (1994) 115 - 118
1995
13. L. Bischoff, J. Teichert and E. Hesse
Interconnection lines following the surface topography
fabricated by writing focused ion beam implantation
Microelectronic Engineering 27 (1995) 351 - 354
14. J. Teichert, L. Bischoff, E.Hesse, P.
Schneider, D. Panknin, T. Geßner, B. Löbner, and N. Zichner,
Comparision of CoSi2 Interconnection Lines on
Crystalline and Non-crystalline Silicon Fabricated by
Writing Focused Ion Beam Implantation,
Applied Surfaces Science 91 (1995)
44 - 49
15. E. Hesse, L. Bischoff and J. Teichert
Angular distribution and energy spread of a lithium
liquid metal ion source
J. Phys. D: Applied Physics; 28 (1995)
1707 - 1709
16. L. Bischoff, J. Teichert, E. Hesse, D. Panknin
and W. Skorupa,
Ion Beam Synthesis of CoSi2-Microstructures by
Means of a High Current Focused Ion Beam
Proc. Int Conf. on Ion Beam Modification of Materials,
Canberra, Australia
5 - 10 February 1995, p. 933 - 936
1996
17. L. Bischoff, K.-H. Heinig, J. Teichert and
W. Skorupa,
Submicron CoSi2 Structures Fabricated by Focused
Ion Implantation and Local Flash Lamp Melting
Nucl Instr. & Methods in Phys. Res. B 112
(1996) 201 - 205
18. L. Bischoff, J. Teichert, E. Hesse, P.D. Prewett
and J.G. Watson
Cluster beams from a Co-Nd liquid alloy ion source
Microelectronic Engineering 30 (1996) 245 - 248
19. P. Schneider, L. Bischoff, J. Teichert and
E. Hesse
Focused Ion Beam Sputtering Yield Measurements
for Cobalt Ions on Silicon and Related Materials
Nucl Instr. & Methods in Phys. Res. B 117
(1996) 77 - 80
20. J. Teichert, L. Bischoff, E.Hesse, P.
Schneider, D. Panknin, T. Geßner, B. Löbner, and N. Zichner,
Cobalt Disilicide Interconnects for Micromechanical
Devices,
Journal of Micromechanics and Microengineering,
6 (1996) 272 - 278
21. W. Driesel, Ch. Dietzsch, E. Hesse, L. Bischoff,
and J. Teichert
In situ Observation of the Tip Shape of Co-Ge
Liquid Alloy Ion Sources in a High Voltage Transmission Electron
Microscope
J. Vac. Sci. Technol. B 14 (3) (1996) 1621 -
1629
22. E. Hesse, G.L.R. Mair, L. Bischoff and
J.Teichert
Parametric Investigation of Current Pulses
in a Liquid Metal Ion Emitter
J. Phys. D: Appl. Phys. 29 (8) (1996) 2193
- 2197
23. E. Hesse, W. Driesel, Ch. Dietzsch, L. Bischoff
and J. Teichert
Shape of a Co-Nd Liquid Alloy Ion Source
Jpn. J. Appl. Phys. 35 (10) (1996) 5564 - 5570
24. J. Teichert, L. Bischoff and B. Köhler
Evidence for acoustic waves induced by focused
ion beams
Appl. Physics Letters, 69 (11) (1996) 1544 -
1546
25. J. Teichert, L. Bischoff and B. Köhler
Investigation of the ion acoustic effect during
focused ion beam irradiation
Nucl Instr. & Methods in Phys. Res.
B 120 (1996) 311 - 314
1997
26. B. Schmidt, L. Bischoff, J. Teichert
Writing FIB Implantation and Subsequent Anisotropic
Wet Chemical Etching for Fabrication of 3D Structures in Silicon
Sensors and Actuators; A61 (1997)
369-373
27. J. Teichert, L. Bischoff, S. Hausmann
Fabrication of MSM detector structures on silicon
by focused ion beam implantation
Microelectronic Engineering; 35
(1997) 455-458
28. L. Bischoff and J. Teichert
Application of highly focused ion beams
Proc. of Int. Symp. Materials Science Applications
of Ion Beam Techniques,
Seeheim, Sept. 9-12, 1996,Trans. Tech. Publications,
Materials Science Forum Vol. 248/249 (1997) 445 - 450, ed. A. G.
Balogh and G. Walter
29. L. Bischoff and J. Teichert
Application of highly focused ion beams
Proc. 14th Int. Conf. Application of Accelerators
in Research and Industry, AIP Conf. Proc.
Vol. 392, ed. J.L. Duggan and I. L. Morgan, AIP
Press, New York 1997, p. 1175 - 1178
30. J. Teichert, L. Bischoff and B. Köhler
Study of the ion-acoustic effect with focused
ion beams
Mat. Res. Soc. Symp. Proc. Vol. 438 (1997) 555
- 560
1998
31. S. Hausmann, L.Bischoff, J. Teichert, D. Grambole,
F. Hermann, and W. Möller
Investigation of dwell-time effects on the cobalt
disilicide formation using focused ion beam implantation
Microelectronic Engineering, 41/42 (1998)
233 - 236
32. J. Teichert, M. Voelskow, L. Bischoff, and
S. Hausmann;
RBS and channeling analysis of cobalt disilicide
layers produced by focused ion beam implantation
Vacuum 51 (2) (1998) 261 - 266
33. J. Teichert, L. Bischoff, and S. Hausmann;
Ion beam synthesis of cobalt disilicide
using focused ion beam implantation
J. Vac. Sci. and Technol. B16 (4) (1998) 2574
- 2577
34. S. Hausmann, L. Bischoff, J. Teichert, M.
Voelskow, D. Grambole, F. Herrmann,
and W. Möller
Damage-related dwell-time effects in focused
ion beam synthesis of cobalt disilicide
Applied Physics Letters,72 (21) (1998) 2719-2721
35. L. Bischoff and J. Teichert,
Focused Ion Beam Sputtering of Silicon and Related
Materials
Report FZD - 217, März 1998
36. T. Ganetsos, D. Tsamakis, D. Panknin, G.L.R.
Mair, J. Teichert, L. Bischoff and C. Aidinis,
Si x-1 Ge x structures fabricated by focused
ion beam implantation
Journal de Physique, IV 8 : P3 (1998) 109 - 112
1999
37. L. Bischoff, S. Hausmann, M. Voelskow
and J. Teichert,
Dwell-time dependence of the defect accumulation
in focused ion beam synthesis of CoSi2
Nucl Instr. & Methods in Phys. Res. B147
(1999) 327 - 331
38. S. Hausmann, L. Bischoff, M. Voelskow, J.
Teichert, W. Möller and H. Fuhrmann,
Dwell-time effects in focused ion beam synthesis
of cobalt disilicide: reflectivity measurements
Nucl Instr. & Methods in Phys. Res. B148
(1- 4) (1999) 610 - 614
39. W. Knapp, L. Bischoff and J. Teichert,
Electron emission characteristics of solidified
gold alloy liquid metal ion sources
Applied Surface Science, 146 (1999) 134 - 137
40. S. Hausmann, L. Bischoff, J. Teichert, M.
Voelskow, and W. Möller
Single-Crystalline CoSi2 Layer Formation by Focused
Ion Beam Synthesis
Int. Microprocesses and Nanotechnology Conf.,Yokohama,
Japan, July 6-8 , 1999
Jap. J. Appl. Phys., Part 1, 38 (12B) (1999)
7148
41. J. Martin, R. Wannemacher, J. Teichert, L.
Bischoff, and B. Köhler
Generation and detection of fluorescent color
centers in diamond with submicron resolution
Appl. Phys. Lett. 75 (20) (1999) 3096 - 3098
2000
42. L.Bischoff, J.Teichert, S.Hausmann, T. Ganetsos,
and G.L.R. Mair
Investigation and optimization of the emission
parameters of alloy liquid metal ion sources
Int. Conf. on Ion Beam Analysis, IBA-14; Dresden
July 26.-30., 1999
Nucl Instr. Meth in Phys. Res. B 161-163 (2000)
1128 – 1131.
43. L.Bischoff, J.Teichert , S.Hausmann , T. Ganetsos
and G.L.R. Mair
Temperature and energy spread investigations
of alloy LMIS
Int. Conf. on Micro-and Nano Engineering,
MNE`99, Rome, Italy, Sept.20-24, 1999
Microelectronic Engineering, 53 (2000)
613 - 616
44. J. Teichert, L. Bischoff, S. Hausmann,
M. Voelskow and H. Hobert
Micro- Raman and ion channeling study of crystal
damage in Si induced by focused Co ion beam implantation
Appl. Phys A 71 (2000) 175 - 180
45. S. Hausmann, L. Bischoff, J. Teichert, M.
Voelskow, and W. Möller
Dwell-time related effects in focused ion beam
synthesis of cobalt disilicide
J. Appl. Phys. 87 (1) (2000) 57 - 62
46. L.Bischoff, J.Teichert, Th.Ganetsos and G.L.R.Mair
Temperature Dependence of the Electric Characteristics
of Liquid Metal Alloy Ion Sources
12th Int. Vacuum Microelectronics Conf. IVMC
`99, Darmstadt, Juli 6.-9.,1999
J. Vac. Sci. and Technol. B19 (1) (2001)
76 – 78
47. L.Bischoff, Th.Ganetsos, J.Teichert, and G.L.R.Mair
Temperature dependence of emission spectra of
liquid metal alloy ion sources
Int. Conf. on Ion Collisions in Solids, ICACS
– 18, Odense, Denmark, August 3 – 8, 1999
Nucl. Instr. Meth. in Phys. Res. B164-165
(2000) 999 - 1003
48.L.Bischoff, Th.Ganetsos, J.Teichert, D. Panknin
and G.L.R.Mair
Si 1-x Ge x microstructures produced by maskless
ion implantation
Proc. Int. Conf. on Ion Collisions in Solids,
ICACS – 18, Odense, Denmark, August 3 – 8, 1999
49. J. Teichert, H. Hobert, L. Bischoff, and S.
Hausmann
Raman investigation of lattice defects in the
CoSi2 synthesis using focused ion beam implantation
Microelectronic Engineering 50 (1-4) (2000) 187
- 192
50. J. Martin, L. Bischoff, J. Teichert, B. Köhler
and R. Wannemacher
Point Light Source for Near-Field Optical Microscopy
DPG Tagungen 2000, Potsdam 13.03. – 16.03.00,
CP 12.36
Regensburg 27.03. – 31.03.00, O 11.88
51. L. Bischoff, J. Teichert, Th. Ganetsos, and
G.L.R. Mair
Temperature dependence of the electric characteristics
of liquid metal alloy ion sources
J. Phys. D: Appl. Phys. 33 (2000) 692 – 695
52. L. Bischoff and J. Teichert
Liquid metal ion source working with an Er70Fe22Ni5Cr3
alloy
J. Phys. D: Appl. Phys. 33 (2000) L69 – L72
53. GLR Mair, Th. Ganetsos, L. Bischoff, and J.
Teichert
Doubly-charged ions from liquid metal alloy ion
sources: direct field-evaporation or post-ionization ?
J. Phys. D: Appl. Phys. 33 (2000) L86– L89
2001
54. L. Bischoff, J. Teichert, and S. Hausmann
Dose rate dependence of irradiation damage in
silicon
E-MRS Spring meeting May 30 – June 2, 2000 Strasbourg,
France
Nucl Instr. Meth in Phys. Res. B178 (2001) 165
–169
55. J. Martin, L. Bischoff , and R. Wannemacher
Microscopy of Ion-Beam Generated Fluorescent
Color Center Patterns in LiF
Opt. Commun. 188 (1-4) (2001) 119 – 128.
56. Ch. Akhmadaliev, L. Bischoff, J. Teichert,
and K. Kazbekov
Ion acoustic microscopy for imaging of
buried structures based on a focused ion beam
Int. Conf. on Micro-and Nano Engineering,
MNE`2000, Jena, Germany, Sept.18-21, 2000
Microelectronic Engineering 57 –
58 (2001) 659 – 664.
57. Th. Ganetsos, C. Aidinis, L. Bischoff, G.
L. R. Mair, J. Teichert, D. Panknin and I. Papadopoulos
Liquid metal ion source-produced germanium ions
for maskless ion implantation
J. Phys. D: Appl. Phys. 34 (2001) L 11 - L 13.
58. C. J. Aidinis, G. L. R. Mair, L. Bischoff
and I. Papadopoulos
A study of the temperature dependence of the
energy spread and energy deficit of a Ge++ ion beam produced by a
liquid metal alloy ion source
J. Phys. D: Appl. Phys. 34 (2001) L 14
-L 16 .
59. Ch. Akhmadaliev, L. Bischoff, J. Teichert,
K. Kazbekov, and B. Köhler
Ion Acoustic Microscopy for Imaging of Buried
Structures Based on a Focused Ion Beam System
DPG Tagungen 2001, Hamburg 26.03. – 30.03.00,
DS 17.4
60. L.Bischoff, J.Teichert, Th.Ganetsos and G.L.R.Mair
Effect of Temperature on the Electric Emission
Characteristics of Liquid Metal Alloy Ion Sources
J. Vac. Sci. Technol. B19 (1) (2001) 76
– 78.
61.M. Posselt, J. Teichert, L. Bischoff and S.
Hausmann
Dose rate and temperature dependence of Ge range
profiles in Si obtained by channeling implantation
Nucl Instr. Meth in Phys. Res. B178 (2001) 170
–175.
62. M. Posselt, L. Bischoff and J. Teichert
Influence of dose rate and temperature on ion-beam-induced
defect evolution in Si investigated by channeling implantation at
different doses
Appl. Phys. Lett. 79 (10) (2001) 1444 – 1446.
63. Th. Ganetsos, G. L. R. Mair and L. Bischoff,
On the temperature dependence of the electric
characteristics and mass spectra of liquid metal alloy ion sources
IFES 2001, 47th International Field Emission
Symposium, July 29 – Aug. 3, 2001, Berlin, Germany
64. Ch. Akhmadaliev, L. Bischoff, J. Teichert,
and K. Kazbekov,
Ion Acoustic Imaging of microstructures using
a Focused Ion Beam system
Proc of 3rd Int. Conf. on Nuclear and
Radiation Physics, 4 – 7 June, 2001, Almaty, Republic of Kazakstan
65. B. Köhler und L. Bischoff,
Entwicklung einer neuen Technologie zur Probenpräparation
für die Transmissions-Elektronen-mikroskopie (TEM) auf der Basis der
Ionenfeinstrahlbearbeitung
Abschlußbericht SMWK Projekt 7/2001 und
FZD – Report FZD-329, August 2001
66. Th. Ganetsos, G. L. R. Mair, L. Bischoff,
J. Teichert and D. Kioussis,
A study of liquid metal alloy ion sources for
the production of ions of interest in the microelectronics industry
Solid State Electronics 45 (2001) 1049 – 1054.
67. L. Bischoff
Der fokussierte Ionenstrahl in der Nanotechnologie
DFG-Graduiertenkolleg Sensorik (GK 51)
Technische Universität Dresden, 05.12.2001
68. L. Bischoff and J.Teichert
Writing Cobalt FIB Implantation into 6H:SiC
Applied Surface Science 184 (2001)
336 – 339
69. L.Bischoff, J.Teichert and V. Heera
Focused Ion Beam Sputtering Investigations on
SiC
Applied Surface Science 184 (2001)
372 – 376
70. L. Bischoff and J. Teichert
Application of focused ion beams in materials
research (invited)
12th International School on Vacuum, Electron
and Ion Technologies, VEIT`01
Proceedings VEIT`01, 17-21 September, 2001 Varna,
Bulgaria
2002
71. G.L.R. Mair, L. Bischoff, A.W.R. Mair, C.J.
Aidinis, Th. Ganetsos, and C.A. Aleiev
An in-depth investigation of the energy distribution
of doubly-charged ions emitted from a Liquid Metal Alloy Ion Source
J. Phys. D: Appl. Phys. 35 (2002) L 33 -L 36
72. Ch. Akhmadaliev and L. Bischoff
Investigation of elastic wave generation in a
solid target by a pulsed ion beam
DPG Tagungen 2002, Regensburg March,
11 – 15, 2002, O 30.8
73. L. Bischoff (invited)
Application of mass separated focused ion beams
IV Internat. Symposium on Ion Implantation and
other Applications of Ions and Electrons, ION2002
June 10 – 13, 2002, Kazimierz Dolny, Poland
74. GLR Mair, C.J. Aidinis, L. Bischoff, and Th.
Ganetsos
On the dynamics of liquid metal ion sources
J. Phys. D: Appl. Phys. 35 (2002) 1392
- 1396
75. M. Posselt, L. Bischoff, J. Teichert and A.
Ster
Dose rate and temperature dependence of ion-beam-induced
defect evolution in Si and SiC studied by channeling implantation
MRS Spring Meeting, Symposium F Defect-
and Impurity-Engineered Semiconductors and Devices III
San Francisco, California , April 1 – 5, 2002,
USA
76. A. Travlos, N. Boukos, G. Apostolopoulos,
C.J. Aidinis and L. Bischoff
Epitaxial erbium silicide on Ge+ implanted silicon
Nucl. Instr. Meth. in Phys. Res. B 196
(2002) 174 - 179
77. L. Bischoff
Focused ion beams from alloy LMIS
Institut of Solid State Physics and Institute
of Electronics
Sofia 19.04.2002
78. L. Bischoff (invited)
Alternatuve Flüssigmetall-Ionenquellen
LEO CrossBeam Workshop
IFW Dresden, 14. - 16. 05. 2002
79. L. Bischoff, B. Schmidt, K.-H. Heinig, T.
Müller, and S. Hellwig
Plasmonic structures fabricated by focused ion
beams
International Workshop on Nanostructures
for Electronics and Optics - NEOP -
Dresden, Germany, August 18 - 21, 2002
80. G. Gorbunov, A.A. Levin, E. Wieser, L. Bischoff,
D. Eckert, A. Mensch, M. Mertig, D.C. Meyer,
H. Reuther, P. Paufler, and W. Pompe
Formation and decomposition of laser-deposited
metastable Fe – Cr phases
International Quantum Electronics Conference
and Conference on Lasers Application and Technologies
IQEC/LAT 2002, Moscow, Russia, June 22 – 28,
2002
81. Posselt, M., Bischoff, L., Teichert, J., Ster,
A.
Dose rate and temperature dependence of ion-beam-induced
defect evolution in Si and SiC
Mat. Res. Soc. Symp. Proc. Vol. 719 (2002) F11.2.1
– F11.2.7
82. C. Akhmadaliev, G.L.R. Mair, , C.J. Aidinis
and L. Bischoff
Frequency spectra and eletrohydrodynamic phenomena
in a liquid gallium field ion emission source
J. Phys. D: Appl. Phys. 35 (2002) L91 – L93.
83. Akhmadaliev, Ch., Bischoff, L
Analysis of microstructures using the ion-acoustic
effect
E-MRS 2002 Spring Meeting, June 18 – 21, 2002
, Strasbourg, France
84. D. Späth, H. Tritschler, L. Bischoff
and W. Schulz,
Micromilling – High Potential Technology for
Micromechanical Parts
Proceedings of the 6th International Conference
on Advanced Manufacturing Systems and Technology, AMST 02, June 20
– 21, Udine, Italy
85. J. Schmidt, H. Tritschler and L. Bischoff,
Improvement of Micro End Milling Tools through
Variation of Tool Manufacturing Method and Geometry
Proceedings of the International Conference
on Micro and Nano Systems, ICMNS2002
August 11 – 14, (2002) Kumning, China
86. L. Bischoff, B. Schmidt, K.-H. Heinig, T.
Müller, S. Hellwig
Plasmonic Structures Fabricated by Focused Ion
Beams
International Workshop on nanostructures for
Electronics and Optics –NEOP-
October 6 – 9, (2002) Dresden, Germany
87. L. Bischoff, GLR Mair, C.J. Aidinis, and Th.
Ganetsos
Fundamental properties of erbium-ions-producing
liquid metal alloy ion sources
Nucl. Instr. Meth. in Phys. Res. B 197
(2002) 282 - 287
2003
88. L. Bischoff, J. Teichert, S. Kitova
and T. Tsvetkova
Optical pattern formation in a-SiC:H films by
Ga+ ion implantation
12th International School on Vacuum, Electron
and Ion Technologies, VEIT`01
17-21 September, 2001 Varna, Bulgaria
Vacuum 69 (1-3) (2003) 73 - 77
89. Ch. Akhmadaliev, L. Bischoff, J. Teichert,
and K. Kazbekov
Ion acoustic microscopy based on IMSA-100 focused
ion beam system
12th International School on Vacuum, Electron
and Ion Technologies, VEIT`01
17-21 September, 2001 Varna, Bulgaria
Vacuum, 69 (1-3) (2003) 431 - 435
90. W. Knapp, L. Bischoff and J. Teichert
Solidified Liquid Metal Ion Source – Formation
of a Nanoemitter
12th International School on Vacuum, Electron
and Ion Technologies, VEIT`01
17-21 September, 2001 Varna, Bulgaria
Vacuum 69 (1-3) (2003) 345 - 349
91. Th. Ganetsos, GLR Mair and L. Bischoff
On the temperature dependence of the electric
characteristics and mass spectra of liquid metal alloy ion sources
Ultramicroscopy 95 (2003) 171 – 181
92. W. Leitenberger, H. Wendrock, L. Bischoff,
T. Panzer, U. Pietsch, J. Grenzer and A. Pucher
Double pinhole diffraction of white synchrotron
radiation
7th International Conference on Surface X-Ray
and Neutron Scattering
September 23-27, 2002, Lake Tahoe, California,
USA
Physica B (submitted)
93. Ch. Akhmadaliev, L. Bischoff, GLR. Mair, CJ.
Aidinis, Th. Ganetsos and M. Anagnostakis
Temperature dependence of emission frequency
spectra of a liquid metal anode
J. Phys. D: Applied Physics 36 (2003) L18 – L20
94. J. Seidel, S. Grafström, L. Eng, and
L. Bischoff
Surface plasmon transmission across narrow grooves
in thin silver films
Appl. Phys. Lett. (accepted)
95. L. Bischoff, GLR Mair, C.J. Aidinis, and Th.
Ganetsos
Erbium ions from a liquid Metal Ion Source for
optoelectronic applications
J. Phys. D: Appl. Phys. (submitted)
96. L. Bischoff and B. Schmidt
Low capacitance point diodes fabricated with
focused ion beam implantation
Solid State Electronics (accepted, Ref.-Nr. 02-45)
97. M. Posselt, L. Bischoff , J. Teichert and
A. Ster
Dose rate and temperature dependence of
ion-beam-induced defect evolution in Si and SiC: Influence on the shape
of channeling implantation profiles
J. Appl. Phys. 93 (2) (2003) 1004 - 1013
98. GLR. Mair, Ch. Akhmadaliev, L. Bischoff, Th.
Ganetsos, C.J. Aidinis and E.A. Anagnostakis
The effect of electrode geometry on the current
fluctuations and emission frequency spectra in a liquid metal ion emitter
J. Phys. D: Appl. Phys. (submitted)
99. L. Bischoff, B. Schmidt, K.-H. Heinig, T.
Müller, S. Hellwig
Plasmonic Structures Fabricated by Focused Ion
Beams
Vorbereitungstreffen des DFG-Schwerpunktes „Nanodrähte
und Nanoröhren“
MPI für Mikrostrukturphysik, Halle 17.01.2003
Patents
- J. Teichert and E. Hesse
Flüssigmetallionenquelle zur Emission von Kobaltionenstrahlen
Deutsches Patent DE 4312028 A1 (1994)
Europäisches Patent 94105227.6 (1994)
B. Köhler, L. Bischoff and J. Teichert
Vorrichtung und Verfahren zur gezielten Probenbearbeitung, vorzugsweise
von Halbleiterbauelementen, mittels einer Ionen-Feinstrahlanlage
Patentanmeldung 196.06.479.3 (1996)
B. Schmidt, L. Bischoff, L. Eng,
Verfahren zur Herstellung von integrierten Abtastnadeln
Patent: DE 100 57 656 C1 (2000)
Patent: EP 1 209 689 A2
T. Tsvetkova, L. Bischoff, J. Teichert,
Schichtmaterial für optische Informationsträger und Lichtmasken
sowie Verfahren zur Herstellung des Schichtmaterials
Patentanmeldung AZ 101 43 616.5 06.09 (2001)