developed by W. Möller
The program TRIDYN_HZDR simulates the dynamic change of thickness and/or composition of multicomponent targets during high-dose ion implantation or ion-beam-assisted deposition. The target and the grown layers are assumed to be amorphous. Up to 5 different atomic species, including those of the beam, may be considered. It is possible to use in the beam up to 4 different ion species with different energies and angles of incidence. The initial target may consist of up to 4 different species (up to 5 if some amount of a beam species is already present in the target). Homogeneous as well as inhomogeneous targets can be considered. Two different types of inputs may be used for inhomogeneous targets: dialog-input of layers, and input of the composition profile from a file.
TRIDYN_HZDR allows to calculate: depth profiles of all atomic species in the target; surface erosion (when sputtering prevails) or grown layer thickness (in the opposed case), etc.
The program is available for Linux and MSWindows systems.
How to get the TRIDYN code?
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Bautzner Landstr. 400
How to use TRIDYN code?
The file TRIDYN_UserGuide.pdf contains a detailed description of the code and detailed operation instructions.