Focussed ion beams for nanostructures
Focused ion meams (FIB) are applied to nanostructures in the following ways:
- Focused ion beam synthesis of nanostructures
- Defect formation and dynamic annealing at FIB implantation
- Ga+ FIB implantation and selective wet etching for 3D nanostructures
- Nanoscale surface ripple and dot patterning under FIB irradiation
- Micro- und nanostructures by local FIB ion milling
- LMAIS development and testing
