Contact

Dr. Kay Potzger

Head Interface Magnetism
Project-group head
k.potzgerAthzdr.de
Phone: +49 351 260 3244

Experimentelle Ausrüstung

Schichtabschneidung

Magnetormetrie

Thin Film Deposition

Bild Beschreibung
AJA Sputter Tool ©Copyright: Naumann, Thomas

AJA sputter chamber

  • 5 confocal sputter guns
  • 1 face-to-face sputter gun
  • 2 rf sources possible
  • max. substrate size 3" with substrate rotation
  • high vacuum

Responsible: T. Naumann

Bestec Sputter System ©Copyright: Naumann, Thomas

Bestec sputter chamber

  • 8 sputter guns, face-to-face&confocal
  • 2 RF sources
  • Ion source
  • max. sample size 4" (100 mm)
  • substrate rotation up to 36 rpm
  • temperature range: RT - 1200 K
  • ultrahigh vacuum

Responsible: T. Naumann

Neue MBE+FIB Kammer

ALDI: apparatus for layer deposition and interfaces

  • Manufacturer: Createc
  • MBE:
    • 5 pocket e-beam evaporator
    • 4 Knudsen cells
    • EFM3 evaporator
  • Ion source: Model Kremer IQ100
  • Plasma source
  • LEED
  • AES
  • sample size 10 x 10 mm²

Responsible: K. Potzger

 Sputnik Chamber

Sputnik: sputter chamber

  • sample size 10 x 10 mm²
  • temperature range: RT - 1000 °C
  • 2 targets
  • base pressure 1e-10 mbar
  • sputter pressure 3e-3 mbar at 43 sccm Argon

Responsible: K. Potzger


Contact

Dr. Kay Potzger

Head Interface Magnetism
Project-group head
k.potzgerAthzdr.de
Phone: +49 351 260 3244