Materials Science Using Ions
Lecturers: Dr. Shengqiang Zhou and Prof. Manfred Helm
Outline:
1 General introduction: ions/irradiation in our life, what to be covered in this course...
2 Fundamental: interaction between ions and solids
3 SRIM - The Stopping and Range of Ions in Solids
4 Ion implantation: doping, semiconductor industry application
5 Ion implantation: synthesis, magnetic semiconductors
6 Ion implantation/irradiation: defect engineering (microelectronics, optics...)
7 Ion beam analysis: Rutherford backscattering
8 Ion beam analysis: Channeling (impurity lattice location)
9 Ion beam analysis: more than RBS
10 Lab tour/lab course (upon request) at HZDR
11 New development: single ion implantation, plasma immersed ion implantation