Phase separation into percolated Si nanostructures in SiO2
Fig. 1. Cross-sectional TEM bright-field image of a Si-SiOx nano-composite layer deposited onto single-crystalline silicon.
Fig. 2. High-resolution zero-loss image of the interface between the Si-SiOx nano-composite and the silicon substrate.
Fig. 3. Superposition of Si (green) and SiOx distributions (red) obtained by EFTEM.