Publications Repository - Helmholtz-Zentrum Dresden-Rossendorf

1 Publication

Study of Ion Beam Assisted Deposition of Al/AlN Multilayers by Comparison of Computer Simulation and Experiment

Wang, X.; Charlamov, V.; Kolitsch, A.; Posselt, M.; Trushin, Y.; Möller, W.

Permalink: https://www.hzdr.de/publications/Publ-1178