Publications Repository - Helmholtz-Zentrum Dresden-Rossendorf

1 Publication

EFTEM, EELS, and Cathodoluminescence in Si-implanted SiO2 Layers

Fitting, H.-J.; Fitting Kourkoutis, L.; Salh, R.; Schmidt, B.


Scanning transmission electron microscopy (STEM) in combination with electron energy loss spectroscopy (EELS) and cathodoluminescence (CL) have been used to investigate Si+-implanted amorphous silicon dioxide layers and the formation of Si nanoclusters.

Keywords: Ion implantation; Si nanoclusters