Publications Repository - Helmholtz-Zentrum Dresden-Rossendorf

1 Publication

Short time thermal processing and defects: history and ideology

Skorupa, W.


In this talk I will treat the fascinating world of defect engineering from the viewpoint of short time thermal processing in the millisecond range. Special focus will be devoted to ion implantation-related issues.

Keywords: millisecond range thermal processing; flash lamp annealing

Involved research facilities

Related publications

  • Invited lecture (Conferences)
    International Symposium on Semiconductors: Defects, Doping and Diffusion (IS2D3), 24.-25.10.2013, Oslo, Norway


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