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Nanoelectronics Research in Dresden

Helm, M.


Dresden has been a center of microelectronics already since the 1960s, and this has continued and even been intensified after the German reunification. Fabs by Siemens, later Infineon and Qimonda, and also by AMD, later Globalfoundries were established. While those were mostly production sites, a concerted effort in fundamental research was started in the framework of the German Excellence Initiative. TU Dresden has established the “Exzellenzcluster” called “Center for Advancing Electronics Dresden (cfaed)”. In the first part of my talk I will introduce the concept of this cluster and give an overview about its activities. In the second part I will present some research going on in my institute at Helmholtz-Zentrum Dresden-Rossendorf (HZDR), in particular related to the integration of III-V semiconductor nanostructures into silicon. If time permits, I may also say a few words about our research in terahertz spectroscopy utilizing the unique free-electron laser at HZDR.

Keywords: nanoelectronics; ion beam synthesis

Involved research facilities

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