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Data publication: Controlled Silicidation of SiNW using FLA

Khan, M. B.; Prucnal, S.; Ghosh, S.; Deb, D.; Hübner, R.; Pohl, D.; Rebohle, L.; Mikolajick, T.; Erbe, A.; Georgiev, Y.

The folder contains the following: 1. all the SEM and TEM images. 2. The schematics of fabrication 3. comparison of silicidation with FLA and RTA and 4. temperature simulations to estimate temperature during FLA process.

  • Reseach data in the HZDR data repository RODARE
    Publication date: 2021-11-23
    DOI: 10.14278/rodare.1269
    License: CC-BY-4.0

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Permalink: https://www.hzdr.de/publications/Publ-33452
Publ.-Id: 33452