Publications Repository - Helmholtz-Zentrum Dresden-Rossendorf
|Total number to be selected: 1 Title record|
Data publication: Controlled Silicidation of SiNW using FLA
The folder contains the following: 1. all the SEM and TEM images. 2. The schematics of fabrication 3. comparison of silicidation with FLA and RTA and 4. temperature simulations to estimate temperature during FLA process.
- Controlled Silicidation of Silicon Nanowires using Flash … (Id 33436) has used this (Id 33452) publication of HZDR-primary research data
Reseach data in the HZDR data repository RODARE
Publication date: 2021-11-23