Publications Repository - Helmholtz-Zentrum Dresden-Rossendorf
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Data publication: Controlled Silicidation of SiNW using FLA
Khan, M. B.; Prucnal, S.; Ghosh, S.; Deb, D.; Hübner, R.; Pohl, D.; Rebohle, L.; Mikolajick, T.; Erbe, A.; Georgiev, Y.
The folder contains the following: 1. all the SEM and TEM images. 2. The schematics of fabrication 3. comparison of silicidation with FLA and RTA and 4. temperature simulations to estimate temperature during FLA process.
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Reseach data in the HZDR data repository RODARE
Publication date: 2021-11-23
DOI: 10.14278/rodare.1269
License: CC-BY-4.0
Downloads:
Permalink: https://www.hzdr.de/publications/Publ-33452
Publ.-Id: 33452
