Publications Repository - Helmholtz-Zentrum Dresden-Rossendorf
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Data publication: Controlled Silicidation of SiNW using FLA
The folder contains the following: 1. all the SEM and TEM images. 2. The schematics of fabrication 3. comparison of silicidation with FLA and RTA and 4. temperature simulations to estimate temperature during FLA process.
Reseach data in the HZDR data repository RODARE
Publication date: 2021-11-23