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Flash lamp annealing of GaN

Rebohle, L.; Prucnal, S.; Akhmadaliev, S.; Kentsch, U.

Abstract

The presentation gives a short overview of our recent activities to dope GaN with Mg by ion implantation and flash lamp annealing.

Keywords: gallium nitride; Mg doping; ion implantation; flash lamp annealing

Involved research facilities

Related publications

  • Lecture (Conference)
    Nutzertreffen "Heißprozesse und RTP" und "Ionenimplantation", 18.05.2022, Erlangen, Deutschland

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