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Data publication: Ion-beam induced compositional and structural changes of Al-Cu-Co multilayer stacks

Černičková, I.; Noga, P.; Ďuriška, L.; Kusý, M.; Novaković, M.; Potočnik, J.; Ziegenrücker, R.; Halanda, J.; Janovec, J.


Measurement results, obtained with a CAMECA IMS 7f-auto, of an as-deposited sample and a sample after 500°C thermal treatment.

Keywords: Multilayer; Nanolayer; Heating; Ion-beam mixing; Electron microscopy; Ion irradiation

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