Publications Repository - Helmholtz-Zentrum Dresden-Rossendorf

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Design of an achromatic mass separator for a focused ion beam system

Teichert, J.; Tiunor, M. A.


The design of an achromatic mass separator which consists of two ExB filters, a stigmator, and the separation aperture is descibed. The optical properties of the ExB filters are derived. The influence of the designd mass are shown.

  • Contribution to external collection
    SPIE Vol 2014 Charged-Particle Optic (1993) 85
    DOI: 10.1117/12.155687