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Development of a cobalt liquid alloy ion source

Hesse, E.; Bischoff, L.; Teichert, J.

Abstract

A cobalt-neodymium liquid alloy ion source for applications in focused ion beam devices was developed and investigated. The performance and the main parameters of the ion source are presented.

  • Journal of Physics D: Applied Physics (Rapid Communication) 27 (1994) pp. 427-428

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