Publications Repository - Helmholtz-Zentrum Dresden-Rossendorf

1 Publication

Preparation of SiO2 Films with embedded Si Nanocrystals by Reactive RF-Magnetron Sputtering

Seifarth, H.; Grötzschel, R.; Markwitz, A.; Matz, W.; Nitzsche, P.; Rebohle, L.
  • Thin Solid Films 330 (1998) 202-205

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Permalink: https://www.hzdr.de/publications/Publ-960
Publ.-Id: 960