Publications Repository - Helmholtz-Zentrum Dresden-Rossendorf
1 PublicationInvestigation of ion-implantation induced damage in 6H-SiC by RBS/C and PAS
Wirth, H.; Anwand, W.; Brauer, G.; Voelskow, M.; Panknin, D.; Skorupa, W.; Coleman, P. G.
- Mat. Sci. Forum 264-268 (1998) 729
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