Publications Repository - Helmholtz-Zentrum Dresden-Rossendorf
1 PublicationFundamentals and Modelling of Reactive Magnetron Sputtering
Moeller, W.
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Invited lecture (Conferences)
Tutorial "Fundamentals and Trends of Plasma Surface Processing", 14.09.2008, Garmisch-Partenkirchen, Germany
Permalink: https://www.hzdr.de/publications/Publ-12173