Engineering for NEMS with ion beams & flash annealing

Skorupa, Wolfgang

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Engineering for NEMS with ion beams & flash annealing

Skorupa, W.

Abstract

Engineering for NEMS with ion beams & flash annealing will be presented based on recent results of the Rossendorf group working for Semiconductor Materials Modification by Ion Beams.

Keywords: NEMS; ion implantation; flash annealing

Involved research facilities

Ion Beam Center DOI: 10.17815/jlsrf-3-159

Related publications

DOI: 10.17815/jlsrf-3-159 is cited by this (Id 23390) publication

Invited lecture (Conferences)
Workshop on Ion Implantation - improving the MEMS processes?, 03.03.2016, Erfurt, Germany

Permalink: https://www.hzdr.de/publications/Publ-23390