Top-down fabrication of silicon nanowires

Georgiev, Yordan

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Top-down fabrication of silicon nanowires

Georgiev, Y.

Abstract

Results on top-down fabrication of silicon (Si) nanowires (Ws) towards junctionless nanowire transistors, Si NW-based biosensors and reconfigurable field effect transistors have been presented at the SENTECH "Plasma Process Technology” seminar.

Involved research facilities

Ion Beam Center DOI: 10.17815/jlsrf-3-159

Related publications

DOI: 10.17815/jlsrf-3-159 is cited by this (Id 24995) publication

Invited lecture (Conferences)
SENTECH "Plasma Process Technology” seminar, 07.04.2016, Berlin, Deutschland

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