Publications Repository - Helmholtz-Zentrum Dresden-Rossendorf
1 PublicationHigh energy implantation into silicon: Gettering and Defect Engineering
Skorupa, W.
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Lecture (others)
Bell Labs, Lucent Technologies, Murray Hill, NJ, USA, Dec. 8, 1997
Permalink: https://www.hzdr.de/publications/Publ-2521