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1 PublicationShort-Range Order in Amorphous and Crystalline Ferroelectric Hf0.5Zr0.5O2
Erenburg, S. B.; Trubina, S. V.; Kvashnina, K. O.; Kruchinin, V. N.; Gritsenko, V. V.; Chernikova, A. G.; Markeev, A. M.
Abstract
The microstructures of amorphous and polycrystalline ferroelectric Hf0.5Zr0.5O2 films are studied by X-ray spectroscopy and ellipsometry. EXAFS spectra demonstrate that the amorphous film consists of an “incompletely mixed” solid solution of metallic oxides HfO2 and ZrO2. After rapid thermal annealing, the mixed Hf0.5Zr0.5O2 oxide films have a more ordered polycrystalline structure, and individual Hf and Zr monoxide islands form in the films. These islands are several nanometers in size and have a structure that is similar to the monoclinic structure of HfO2 and ZrO2. The presence of the HfO2 and ZrO2 phases in the Hf0.5Zr0.5O2
films is also detected by ellipsometry
Involved research facilities
- Rossendorf Beamline at ESRF DOI: 10.1107/S1600577520014265
Related publications
- DOI: 10.1107/S1600577520014265 is cited by this (Id 27841) publication
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Journal of Experimental and Theoretical Physics 126(2018)6, 816-824
DOI: 10.1134/S1063776118060031
Cited 5 times in Scopus
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