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1 PublicationSputtering of nanostructured tungsten and comparison to modelling with TRI3DYN
Stadlmayr, R.; Szabo, P. S.; Mayer, D.; Cupak, C.; Dittmar, T.; Bischoff, L.; Möller, S.; Rasinski, M.; Wilhelm, R. A.; Möller, W.; Aumayr, F.
Abstract
He-induced nanostructured tungsten (so called W-fuzz) was bombarded with Ar ions under 60 degree and the dynamic erosion behaviour experimentally investigated. By using a highly sensitive quartz-crystal-microbalance technique in a particle catcher configuration the sputtered particles distribution of Wfuzz could be evaluated. In contrast to a at sample, where sputtered particles are emitted primarily in forward direction, we find that W-fuzz samples emit sputtered particles preferably in backward direction (i.e. in the direction of the incident ion beam). After continuous Ar irradiation of a W-fuzz sample the distribution approaches that of a at sample. In addition to experimental data we also show modelling results obtained with a state-of-the-art Monte-Carlo (MC) binary collision approximation (BCA) code TRI3DYN in full 3D. Surface morphology changes as monitored by SEM as well as the dynamic sputtering behaviour can be well reproduced by the full 3D MC-BCA code.
Keywords: Erosion; Quartz crystal microbalance; TRI3DYN; Surface roughness; Sputtering; nanostructured tungsten; W-fuzz
Involved research facilities
- Ion Beam Center DOI: 10.17815/jlsrf-3-159
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Cited 24 times in Scopus
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