Publications Repository - Helmholtz-Zentrum Dresden-Rossendorf
1 PublicationModeling of impurity gettering in silicon by ion implantation induced defects
Heinig, K.-H.; Jäger, H.-U.
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Lecture (Conference)
E-MRS Spring Meeting, Symposium F - Process Induced Defects in Semiconductors, Strasbourg, France, June 1-4, 1999
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