Publications Repository - Helmholtz-Zentrum Dresden-Rossendorf
1 PublicationInherent Possibilities and Restrictions of Plasma Immersion Ion Implantation Systems
Mändl, S.; Brutscher, J.; Günzel, R.; Möller, W.
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Journal of Vacuum Science and Technology. Part B 14 (1996) 4 pp. 2701-2706
DOI: 10.1116/1.589007
Cited 57 times in Scopus
Permalink: https://www.hzdr.de/publications/Publ-357