Publications Repository - Helmholtz-Zentrum Dresden-Rossendorf

Fabrication of Si nanocrystals for nonvolatile memories using ion beams

Müller, T.; Heinig, K.-H.; Schmidt, B.; Röntzsch, L.; Stegemann, K.-H.

Keywords: ion implantation; nanocluster; atomistic computer simulations; nonvolatile memory

• Invited lecture (Conferences)
  Intern. Workshop on Semiconductor Nanocrystals (SEMINANO), 10.-12.09.2005, Budapest, Hungary

Permalink: https://www.hzdr.de/publications/Publ-8241