Publications Repository - Helmholtz-Zentrum Dresden-Rossendorf
1 PublicationMultimodal impurity redistribution and nanocluster formation in Ge implanted silicon dioxide films
von Borany, J.; Grötzschel, R.; Heinig, K.-H.; Markwitz, A.; Matz, W.; Schmidt, B.; Skorupa, W.
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Applied Physics Letters 71 (22), 1 December 1997, p. 3215-3217
DOI: 10.1063/1.120294
Cited 99 times in Scopus
Permalink: https://www.hzdr.de/publications/Publ-916