Publications Repository - Helmholtz-Zentrum Dresden-Rossendorf

Sheath and Presheath Dynamics in Plasma Immersion Ion Implantation

Mändl, S.; Günzel, R.; Möller, W.

• Journal of Physics D: Applied Physics 31 (1998) 1109-1117

Permalink: https://www.hzdr.de/publications/Publ-940